Advances in
semiconductor manufacturing are triggering an exponential increase in device
complexity. Today's manufacturers must rely on efficient process monitoring –
but conventional measuring methods alone can no longer guarantee the required
quality standards. This is why force measurement is emerging as a critical
factor in both front-end and back-end production processes.
Piezoelectric
measurement technology from Kistler ensures high-resolution monitoring and
control of the forces applied during semiconductor manufacturing processes – no
matter how small. Conventional metrology may be unable to access force, as a
physical quantity that can cause device failure – but piezo-based force
measurement "makes the invisible visible".
Process
visibility based on dynamic force measurement technology delivers impressive
benefits for the semiconductor manufacturing industry:
·
Early detection of mechanical stress
deviations
·
Down force precision with full loop
control
·
Product traceability and process
optimization
·
Enhanced machine performance
·
Reduced quality costs
Process
monitoring with force measurement technology delivers real added value for the
semiconductor manufacturing industry. Making the invisible visible is the key
to overcoming the challenges of tomorrow's world!
